diff --git a/tools/gen-critical-atomics/gen-critical-atomics.go b/tools/gen-critical-atomics/gen-critical-atomics.go
index f444c1c3..75ea3270 100644
--- a/tools/gen-critical-atomics/gen-critical-atomics.go
+++ b/tools/gen-critical-atomics/gen-critical-atomics.go
@@ -17,7 +17,7 @@ var tmpl = template.Must(template.New("go").Funcs(template.FuncMap{
 		return v
 	},
 	"title": strings.Title,
-}).Parse(`//+build baremetal,!tinygo.wasm
+}).Parse(`//go:build baremetal && !tinygo.wasm
 
 // Automatically generated file. DO NOT EDIT.
 // This file implements standins for non-native atomics using critical sections.
diff --git a/tools/gen-device-avr/gen-device-avr.go b/tools/gen-device-avr/gen-device-avr.go
index 1e841b95..7885eef3 100755
--- a/tools/gen-device-avr/gen-device-avr.go
+++ b/tools/gen-device-avr/gen-device-avr.go
@@ -285,7 +285,7 @@ func writeGo(outdir string, device *Device) error {
 	t := template.Must(template.New("go").Parse(`// Automatically generated file. DO NOT EDIT.
 // Generated by gen-device-avr.go from {{.metadata.file}}, see {{.metadata.descriptorSource}}
 
-// +build {{.pkgName}},{{.metadata.nameLower}}
+//go:build {{.pkgName}} && {{.metadata.nameLower}}
 
 // {{.metadata.description}}
 package {{.pkgName}}
diff --git a/tools/gen-device-svd/gen-device-svd.go b/tools/gen-device-svd/gen-device-svd.go
index f10b7d23..ce1f7ed1 100755
--- a/tools/gen-device-svd/gen-device-svd.go
+++ b/tools/gen-device-svd/gen-device-svd.go
@@ -875,7 +875,7 @@ func writeGo(outdir string, device *Device, interruptSystem string) error {
 	}).Parse(`// Automatically generated file. DO NOT EDIT.
 // Generated by gen-device-svd.go from {{.device.Metadata.File}}, see {{.device.Metadata.DescriptorSource}}
 
-// +build {{.pkgName}},{{.device.Metadata.NameLower}}
+//go:build {{.pkgName}} && {{.device.Metadata.NameLower}}
 
 // {{.device.Metadata.Description}}
 //