diff --git a/src/device/nxp/hardfault.go b/src/device/nxp/hardfault.go
index dbcd0a96..e37c5f9d 100644
--- a/src/device/nxp/hardfault.go
+++ b/src/device/nxp/hardfault.go
@@ -2,6 +2,7 @@
 // Hardfault aliases for definitions that have inconsistent naming (which are
 // auto-generated by gen-device-svd.go) among devices in package nxp.
 
+//go:build nxp && !mimxrt1062
 // +build nxp,!mimxrt1062
 
 package nxp
diff --git a/src/device/nxp/mimxrt1062_clock.go b/src/device/nxp/mimxrt1062_clock.go
index 38e6e533..2bd0e33e 100644
--- a/src/device/nxp/mimxrt1062_clock.go
+++ b/src/device/nxp/mimxrt1062_clock.go
@@ -2,6 +2,7 @@
 // Type definitions, fields, and constants associated with various clocks and
 // peripherals of the NXP MIMXRT1062.
 
+//go:build nxp && mimxrt1062
 // +build nxp,mimxrt1062
 
 package nxp
diff --git a/src/device/nxp/mimxrt1062_hardfault.go b/src/device/nxp/mimxrt1062_hardfault.go
index c11ff565..c36a3a47 100644
--- a/src/device/nxp/mimxrt1062_hardfault.go
+++ b/src/device/nxp/mimxrt1062_hardfault.go
@@ -2,6 +2,7 @@
 // Hardfault aliases for definitions that have inconsistent naming (which are
 // auto-generated by gen-device-svd.go) among devices in package nxp.
 
+//go:build nxp && mimxrt1062
 // +build nxp,mimxrt1062
 
 package nxp
diff --git a/src/device/sam/atsamd51x-bitfields.go b/src/device/sam/atsamd51x-bitfields.go
index 0de067d0..55f17ef9 100644
--- a/src/device/sam/atsamd51x-bitfields.go
+++ b/src/device/sam/atsamd51x-bitfields.go
@@ -1,6 +1,7 @@
 // Hand created file. DO NOT DELETE.
 // atsamd51x bitfield definitions that are not auto-generated by gen-device-svd.go
 
+//go:build sam && atsamd51
 // +build sam,atsamd51
 
 // These are the supported pchctrl function numberings on the atsamd51x
diff --git a/src/device/sam/atsame5x-bitfields.go b/src/device/sam/atsame5x-bitfields.go
index abec8252..29c52002 100644
--- a/src/device/sam/atsame5x-bitfields.go
+++ b/src/device/sam/atsame5x-bitfields.go
@@ -1,6 +1,7 @@
 // Hand created file. DO NOT DELETE.
 // atsamd51x bitfield definitions that are not auto-generated by gen-device-svd.go
 
+//go:build sam && atsame5x
 // +build sam,atsame5x
 
 // These are the supported pchctrl function numberings on the atsamd51x